Table of specification | Mitaka Kohki Co., Ltd.

Table of specification	PF-60	NH-3Ns	NH-3SPs	NH-4Ns	NH-5Ns	NH-3MAs
Table of specification
Movable range (X,Y,Z,AF)[mm]	60,60,60,10	150,150,100,10	150,150,120,10	250,200,100,10	300,400,120,10	100,100,100,10
Scale resolution (X,Y,Z,AF)[um]	0.1,0.1,0.1,0.01	0.1,0.1,0.1,0.01	0.01,0.01,0.1,0.001	0.1,0.1,0.1,0.01	0.1,0.1,0.1,0.01	0.1,0.1,0.1,0.01