仕様一覧表 | PF-60 | NH-3Ns | NH-3SPs | NH-4Ns | NH-5Ns | NH-3MAs |
|
|
|
|
|
|
可動範囲 (X,Y,Z,AF)[mm] |
60,60,60,10 |
150,150,100,10 |
150,150,120,10 |
250,200,100,10 |
300,400,120,10 |
100,100,100,10 |
分解能 (X,Y,Z,AF)[um] |
0.1,0.1,0.1,0.01 |
0.1,0.1,0.1,0.01 |
0.01,0.01,0.1,0.001 |
0.1,0.1,0.1,0.01 |
0.1,0.1,0.1,0.01 |
0.1,0.1,0.1,0.01 |