φ50μm glass sphere evaluation sample
(courtesy of Saitama University)

As an optional function, roundness measurement / evaluation function is available. This roundness measurement function offers roundness evaluation of workpieces that have less than 0.1μm roundness. MLP-2 carries out roundness measurement of very small workpieces by using its high precision non-contact measurement method.

The roundness evaluation result of a φ50μm glass sphere is indicated above.

This roundness measurement adopted "polygon measurement + stitching technology" which offers centering-free workpiece setup (it is very difficult to center a very small workpiece) and decreases θ axis deflection. ("stitching" is to measure each pre-set profile with overwrapping measuring area in the polygon measurement and use the overwrapped portions to combine each profile into one profile data.)