workpiece: φ150mm parabolic mirror measuring area: XYZ = 150 x 150 x 10 (130*)mm (*optional)
Main Features
Mitaka laser probe 3D measuring instruments are user-friendly systems which offer high-precision measurement
Capable of measuring steep angles
ピンゲージの断面形状
Capable of autofocusing on any
workpieces with their scattering light and measuring approx.80° with their surface roughness ≥0.02µm (Objective: NA=0.95)
ステージ走査型（NH）
レーザ走査型
High autofocus repeatability
workpiece: mirror surface
PV = 3.5nm δ value = 0.8nm
Wide measuring range with high resolution
ステージ平面度±0.107μm（測定エリア5x5mm）
ステージ真直度±0.107μm（測定長150mm）
High resolution
workpiece: unevenness of evaporated metal filmmeasuring area: XYZ = 40 x 40µm Flatness: 38nm
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