This instrument consists of a laser autofocus (AF) microscope for Z-coordinate measurement and a high-precision XYZ stage.

This figure illustrates the measuring principle, "point autofocusing" (registered in ISO-25178-605), of our laser probe method.

The laser beam passes through one side of the objective and reflects back to the opposite side of the objective after focusing on a workpiece surface.

The reflected laser beam forms an image on the autofocus sensor after passing through an imaging lens. And, its computer loads every focused point obtained by scanning the high-precision XYZ stage.The point autofocusing has a wide measuring range in high precision and is not influenced by color or reflection ratios of workpiece surfaces.

Laser spot tip diameter is 0.4µm(*1), and this instrument use it as a probe to search a surface profile of a workpiece.It automatically carries out size measurement, such as width, height, etc. in high precision.
(*1) when using 100X objective (NA=0.95)