仕様一覧表PF-60NH-3NNH-3SPNH-4NNH-5NNH-3MA
可動範囲
(X,Y,Z,AF)[mm]
60,60,60,10 150,150,100,10 150,150,120,10 250,200,100,10 300,400,120,10 100,100,100,10
分解能
(X,Y,Z,AF)[um]
0.1,0.1,0.1,0.01 0.1,0.1,0.1,0.01 0.01,0.01,0.1,0.001 0.1,0.1,0.1,0.01 0.1,0.1,0.1,0.01 0.1,0.1,0.1,0.01